首页|基于PMNT晶片热释电型太赫兹探测器的设计与应用(特邀)

基于PMNT晶片热释电型太赫兹探测器的设计与应用(特邀)

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针对太赫兹探测器的研究现状,分析研究了现有太赫兹探测器的优缺点,并对热释电型太赫兹探测器的热释电材料和吸收材料进行研究,提出了一种基于铌镁钛酸铅(PMNT)晶片的新型太赫兹探测器的设计和制作方法.用PMNT晶片作为热释电材料,碳纳米管作为吸收材料,使用精密减薄抛光工艺和溅射电极工艺等工艺技术,完成了新型热释电太赫兹探测器的设计与制作.并利用该探测器设计了一款太赫兹功率计,经测试,该功率计在0.1~30 THz宽频段、0.5~100 mW大功率动态范围内,功率测量准确度达到了±10%,综合指标达到国际同类产品先进水平,应用效果良好.
Design and Application of Pyroelectric Terahertz Detector Based on PMNT Chip(Invited)
In view of the current research status of terahertz detectors,the advantages and disadvantages of ex-isting terahertz detectors are analyzed,and the pyroelectric materials and absorbent materials of pyroelectric tera-hertz detectors are studied.A new design and fabrication method of terahertz detectors based on PMNT chips is pro-posed.Using PMNT wafer as pyroelectric material,carbon nanotubes as absorption material,using precision thin-ning polishing technology and sputtering electrode technology,the design and manufacture of a new pyroelectric terahertz detector are completed.And using the detector designed a terahertz power meter,after testing,the power meter in 0.1~30 THz wide band,0.5~100 mW high power dynamic range,the power measurement accuracy reached±10%,the comprehensive index reached the international advanced level of similar products,the application effect is good.

PMNTterahertz detectorpyroelectric effectcarbon nanotubesterahertz power meter

徐玉华、陈建伟、刘志明、尹炳琪、吕振川、谭景甲、马超、张志辉、罗豪甦

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中电科思仪科技股份有限公司,山东 青岛

中国科学院上海硅酸盐研究所,上海

PMNT 太赫兹探测器 热释电效应 碳纳米管 太赫兹功率计

2024

光电技术应用
东北电子技术研究所

光电技术应用

影响因子:0.406
ISSN:1673-1255
年,卷(期):2024.39(1)
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