基于PMNT晶片热释电型太赫兹探测器的设计与应用(特邀)

Design and Application of Pyroelectric Terahertz Detector Based on PMNT Chip(Invited)

徐玉华 ¹陈建伟 ²刘志明 ¹尹炳琪 ¹吕振川 ¹谭景甲 ¹马超 ¹张志辉 ¹罗豪甦²

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作者信息

1. 中电科思仪科技股份有限公司,山东青岛
2. 中国科学院上海硅酸盐研究所,上海
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摘要

针对太赫兹探测器的研究现状,分析研究了现有太赫兹探测器的优缺点,并对热释电型太赫兹探测器的热释电材料和吸收材料进行研究,提出了一种基于铌镁钛酸铅(PMNT)晶片的新型太赫兹探测器的设计和制作方法.用PMNT晶片作为热释电材料,碳纳米管作为吸收材料,使用精密减薄抛光工艺和溅射电极工艺等工艺技术,完成了新型热释电太赫兹探测器的设计与制作.并利用该探测器设计了一款太赫兹功率计,经测试,该功率计在0.1～30 THz宽频段、0.5～100 mW大功率动态范围内,功率测量准确度达到了±10%,综合指标达到国际同类产品先进水平,应用效果良好.

Abstract

In view of the current research status of terahertz detectors,the advantages and disadvantages of ex-isting terahertz detectors are analyzed,and the pyroelectric materials and absorbent materials of pyroelectric tera-hertz detectors are studied.A new design and fabrication method of terahertz detectors based on PMNT chips is pro-posed.Using PMNT wafer as pyroelectric material,carbon nanotubes as absorption material,using precision thin-ning polishing technology and sputtering electrode technology,the design and manufacture of a new pyroelectric terahertz detector are completed.And using the detector designed a terahertz power meter,after testing,the power meter in 0.1～30 THz wide band,0.5～100 mW high power dynamic range,the power measurement accuracy reached±10%,the comprehensive index reached the international advanced level of similar products,the application effect is good.

关键词

PMNT/太赫兹探测器/热释电效应/碳纳米管/太赫兹功率计

Key words

PMNT/terahertz detector/pyroelectric effect/carbon nanotubes/terahertz power meter

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出版年

2024

光电技术应用

东北电子技术研究所

光电技术应用

影响因子：0.406

ISSN：1673-1255

参考文献量16

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