基于白光干涉的三维表面形貌拼接方法研究
Research on Three-dimensional Surface to Pography Splicing Method Based on White Light Interference
任瑛 1黄育争 2魏长胜 1申展 1刘颖刚1
作者信息
- 1. 西安石油大学陕西省油气资源光纤探测工程研究中心和陕西省油气井测控技术重点实验室,西安
- 2. 西安昂科光电有限公司,西安
- 折叠
摘要
白光干涉测量技术由于具有非接触、无损伤、量程大、精度高和灵敏度高等特点,被应用于微纳米结构三维表面形貌测量中,但存在受限于显微物镜视场限制测量范围问题.提出了一种可以有效提高测量范围的三维表面形貌拼接方法.通过对多次采集的小范围高分辨率白光干涉图样进行域划分,采用三维形貌数据拼接配准方法,利用模板匹配算法对图像的二值化矩阵进行匹配计算,实现了待测元件的表面形貌的有效表征.研究发现,当采用不同的图像拼接方式即上下拼接、左右拼接和2&2拼接方式时,图像拼接效果有一定差异,其准确度和产生的误差不同.三种拼接方式中,2&2拼接方式能够有效减小操作误差,实现大范围和高分辨干涉图样拼接,在白光干涉三维形貌表征中具有广阔应用前景.
Abstract
White light interferometry has been applied to micro and nano structure 3D surface topography mea-surement due to its non-contact,non-damage,large range,high precision and high sensitivity.However,the mea-surement range is limited by the microscopic objective field.A 3D surface topography splicing method is proposed which can effectively improve the measurement range.Through the domain division of small range and high resolu-tion white light interference pattern collected for many times,the three-dimensional topography data registration method is adopted,and the template matching algorithm is used to match the binary matrix of the image,and the sur-face topography of the components to be measured is effectively characterized.It is found that when different image splicing methods are used,namely up-down splicing,left-right splicing and 2&2 splicing methods,the effect of im-age splicing is different,and the accuracy and error are different.Among the three splicing methods,the 2&2 splic-ing method can effectively reduce the operation error,achieve a large range and high resolution interference pattern splicing,and has a broad application prospect in the white light interference three-dimensional topography charac-terization.
关键词
白光干涉仪/表面形貌/拼接方式/图像划分Key words
white light interferometer/surface topography/splicing mode/image partitioning引用本文复制引用
出版年
2024
NETL
NSTL
维普
万方数据