High-precision multi-focus laser sculpting of microstructured glass

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外文摘要：Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices,while it is still challenging as the high brittleness of glass.We here create a three-dimensional mul-ti-focus laser for glass micro-sculpting through a beam-shaping technology based on the superposition of lens and grat-ing phase diagrams.The multi-focus laser modification in tandem with chemical etching enables the fabrication of glass microstructures with highly adjustable profiles.Refractive-index-induced deviations are migrated via algorithm correction to ensure multi-focus positional accuracy.Energy un-uniformity due to equidistant laser spots arrangement is eliminated through their coordinate randomization following the target profiles.Finally,uniform laser spots with a proper point-to-point distance create connected cracks inside glass,enabling efficient etching with enhanced rates along the modified profile and the fabrication of surface microstructures.We demonstrate diverse groove arrays with profiles of trapezoid,semicircle,and triangle,revealing low roughness around 1.3 μm,a high depth-width ratio of 3:1,and depth up to 300 μm,which underscore broad applications such as fiber packaging.

外文关键词：

ultrafast laser processingmulti-focus shaping beammicro-grooveglass

作者：

Kang Xu、Peilin Huang、Lingyu Huang、Li Yao、Zongyao Li、Jiantao Chen、Li Zhang、Shaolin Xu

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作者单位：

Department of Mechanical and Energy Engineering,Southern University of Science and Technology,1088 Xueyuan Avenue,Shenzhen 518055,China

Guangdong Provincial Engineering and Technology Research Center for Ultrafast Laser Micro-Nano Manufacturing Equipment and Technology,Shenzhen Guihua Intelligent Technology Co.,Ltd.,Shenzhen 518109,China

出版年：

2024

DOI：

10.29026/oea.2024.240082

光电进展(英文版)

ISSN：

年,卷(期)：2024.7(11)