Research Status and Development Trend of Silver-Based Alloy Targets
Silver and silver alloy target for new display and semiconductor integrated circuits is one of the most important electronic materials,but the related to the preparation technology has not yet realized the industrialization of the development in China.In recent years,with the rapid development of new display technology and semiconductor integrated circuits in our country,the total market volume and economic value of silver alloy targets are also continuing to grow rapidly,and the related industrialization process is also gradually accelerated.For this reason,a comprehensive review of silver alloy targets is conducted from the aspects of preparation technology,patent status,application prospects and market overview.The silver alloy target preparation process of raw material purification,micro-alloying and other key technologies such as process principles and target micro-structure control methods are analyzed and discussed.The process of silver alloy target preparation and micro-structure and morphology,the role of crystal orientation regulation mechanism and its effect on the performance of the alloy film are described,and the main problems in the field of silver alloy target preparation in the country are put forward at present.In addition,for the characteristics of silver and silver alloy films that are not resistant to oxidation,vulcanization and poor weather resistance in the process of practical application,we summarize and analyze them from the perspective of domestic and foreign patent applications,focusing on the analysis of the performance and mechanism of the addition of elements such as In,Pd,Cu,Sc,Sn and so on to the target anti-oxidation,anti-vulcanization and weather resistance in the process of micro-alloying to provide the reference for the research and development of the silver alloy targets of new compositions.In conclusion,the research status of silver alloy target in our country at the present stage is summarized from the aspects of market scale and technological development progress.It is put forward that the use of micro-alloying and organization optimization is still the main direction for the development of new products of silver alloy target in the future,and the soundness of the industrial chain and the lack of synergistic linkage in many fields are the main difficulties and challenges in the development of the silver alloy industry at present.
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