Water-jet guided laser machining technology has the advantages of low thermal effect,high pre-cision and no tool damage,and has been applied to the machining of high-precision components.In order to reduce the diameter of laser focusing spot to facilitate the accurate coupling between laser and water-jet and improve the quality of laser hole,a method of reducing the diameter of laser focusing spot based on the principle of double-slit interference is proposed.The geometric and mathematical models of tradi-tional water-jet guided laser and double-slit interference water-jet guided laser drilling are constructed.Based on COMSOL simulation,the effects of traditional and double-slit interference water-jet guided la-ser drilling on the evolution of laser hole profile,the distribution of heat affected area and the size of re-cast layer are compared and analyzed under the same laser beam parameters and processing conditions.The results show that compared with traditional water-jet guided laser,the double-slit water-jet guided laser processing technology can effectively reduce the diameter of laser hole,the cone angle,the width of heat-affected area and the size of recasting layer,and further reduce the diameter of laser focusing spot under the existing conditions.