In order to study the effects of different dispersion models on the ellipsometry spectra analysis of TiO2 films containing pores,TiO2 thin films are prepared by sol-gel method,and five dispersion models are used to fit the ellipsometry spectra of TiO2 films in the wavelength range of 1.55-4 eV.The fitting results of each model are verified by the oblique reflection spectra.The results show that the selection of different dispersion models has an effect on the fitting results of film thickness and porosity,and the fit-ting results of refractive index dispersion are obviously affected by the dispersion model.New-Amor-phous,Tauc-Lorentz and Adachi-New Forouhi models are suitable for the ellipsometry spectra fitting of sol-gel TiO2 film on the whole test band.However,the Cauchy Absorbent and Sellmeier Absorbent mod-els cannot get a good ellipsometric spectral fitting for the whole test band,and the applicable band is nar-row.The results provide a reference for the ellipsometry spectra analysis of sol-gel TiO2 thin films con-taining pores.
关键词
光谱学/光学常数/椭偏光谱/色散模型
Key words
spectroscopy/optical constant/spectroscopic ellipsometry/dispersion model
万方数据