Phase reconstruction of quadriwave lateral shearing interferometry based on rhombic-Gaussian combined window filtering
袁训禹 1李卓骏 1周向东 2汪慧 1王华森 1连子萱1
扫码查看
点击上方二维码区域，可以放大扫码查看
作者信息
1. 湖北工业大学机械工程学院,湖北武汉 430068
2. 江汉大学智能制造学院,湖北武汉 430056
折叠
摘要
针对四波横向剪切干涉(quadriwave lateral shearing interference,QLSI)相位重建中现有常规滤波窗提取差分相位时存在易受噪声、频谱泄漏和其他级次频谱串扰影响等问题,提出了一种采用菱形高斯组合窗滤波的相位重建方法.通过由频谱面内的菱形窗和垂直于频谱面的一系列二维高斯窗组合而成的滤波窗,从QLSI干涉图中提取两正交方向的差分相位,最终由两个差分相位通过基于最小二乘的傅里叶变换法重建出待测相位.采用标准样品进行实际测量,比较了使用菱形高斯组合窗和其他四种常规滤波窗滤波对重建相位的重建相位差、均方根误差(root mean square error,RMSE)和峰谷(peak to vally,PV)误差的影响.结果表明:本文提出的方法重建相位的相位差最接近样品标称值,重建相位的RMSE误差和PV误差均取得最小值,可以有效提高相位重建质量.
Abstract
A phase reconstruction method using a rhombic-Gaussian combined filtering window is pro-posed in order to solve the problems of susceptibility to noise,spectral leakage,and crosstalk from other order spectra in the extraction of differential phase using conventional filtering windows in quadriwave lateral shearing interference(QLSI)phase reconstruction.By combining a rhombic window on the spec-trum plane with a series of two-dimensional Gaussian windows perpendicular to the spectrum plane,the differential phases in two orthogonal directions are extracted from the QLSI interferogram.Finally,the phase to be measured is reconstructed from the two differential phases by a least square based Fourier transform method.Experimental measurements are implemented under a standard sample to compare the proposed rhombic-Gaussian composite window with four conventional filtering windows on the effects of the reconstructed phase in terms of the accuracy of the phase difference,root mean square error(RMSE),and peak-to-valley(PV)error.The results demonstrate that the phase difference of the phase retrieved by the proposed method is closest to the nominal value of the sample,and the RMSE error andPVerror of the reconstructed phase are both the minimum,thus effectively improving the quality of phase recon-struction.
维普
万方数据