首页|Research on a compact and high sensitivity gas pres-sure sensor based on fiber Fabry-Pérot interferometer and Bragg grating
Research on a compact and high sensitivity gas pres-sure sensor based on fiber Fabry-Pérot interferometer and Bragg grating
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A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fi-ber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical model for pres-sure and temperature sensing is established.Building on this foundation,a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG.The concept of separate measurement and the mechanisms en-hancing pressure sensitivity are meticulously analyzed,and the corresponding samples are fabricated.The experimen-tal results indicate that the pressure sensitivity of the sensor is-747.849 nm/MPa in 0-100 kPa and its linearity is 99.7%and it maintains good stability in 150 min.The sensor offers the advantages of compact size,robust construc-tion,easy fabrication,and high sensitivity,making it potentially valuable for micro-pressure application.
LIU Qinpeng、XING Meihua、YANG Di、LIU Bo、YAN Cheng
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College of Science,Xi'an Shiyou University,Xi'an 710065,China
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