This article measured As in PM2.5 using different materials of filter membrances,and different pre-treatment meth-ods.The results showed that the background value of As was the lowest among the imported quartz filter membranes,and the recovery rates of PTFE and quartz filter membrane were not significantly different.The precision and accuracy of microwave di-gestion method are slightly lower than that of graphite digestion method;the precision and accuracy of the quality control sam-ple determination of arsenic in filter membrane are good with little difference.The relative deviation of As in low concentration PM2.5 measured by ICP-MS was greater than 20%,and the relative standard deviation(RSD%)was greater than 3%in ac-tual sample comparison.