Sinusoidal frequency modulation interferometer(SFMI)is widely used in basic science,precision manu-facturing and other fields.However,nonlinear errors such as phase modulation depth change limit its measurement range and accuracy.In this paper,a new Lissajous figure correction method for SFMI is proposed.Elliptic parameters of orthogonal interference signals in the measurement process are extracted through a dimension reduced iterative algorithm to achieve re-al-time correction,thus eliminating nonlinear errors and improving measurement accuracy.The simulation test proves that the proposed method has high accuracy,high bandwidth utilization and low resource consumption,which is of great signifi-cance for the range and accuracy improvements of SFMI,as well as its application expansion.
关键词
正弦调频干涉仪/Lissajous校正/降维迭代算法
Key words
sinusoidal frequency modulation interferometer/lissajous figure correction/dimension reduced iterative al-gorithm
维普
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