Error Compensation of Topography Measurement System Based on Cross and Mutate Particle Swarm Optimization Algorithm
The stylus surface topography measurement system plays an important role in production and scientific re-search because of its high precision,resolution,stability,reliability and good dynamic characteristics.However,the nonlinear error caused by its lever structure significantly increases the error in large range measurement,affecting the measurement accuracy.In this paper,a new particle swarm optimization algorithm is proposed.Particles decides to cross and mutate based on their affinity and concentration,which signifiicantly improves the iteration speed and convergence accuracy of the algo-rithm.And through the measurement and calibration of high-precision standard spherical crown,the experimental verifica-tion shows that the compensation error is within±0.5μm.
万方数据
维普
