Ceramic matrix composites have a series of advantages such as high hardness,high strength,high wear re-sistance and corrosion resistance,which have great application prospects in aerospace,special protection and other fields.At the same time,high precision and high efficiency processing of ceramic matrix composites is difficult to achieve by tradition-al mechanical pro-cessing.Ultrasonic vibration assisted machining technology has been widely used in the deep hole,thin wall and complex surface machining of ceramic matrix composites,and has formed a unique industry system.It is an impor-tant development direction in the field of precision and ultra-precision manufacturing.For development of ultrasonic vibra-tion aided processing technology in recent years,this paper summarizes the present status of the ultrasonic vibration system,the system is introduced in ceramic matrix composites in the field of machining,ultrasonic vibration assisted grinding,drill-ing,and the application of rotary ultrasonic machining and ultrasonic machining,the research status quo.Finally,the trend of the application of ultrasonic vibration assisted machining technology are summarized and prospected.