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惯性传感器测试质量质心测量装置及方法研究

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惯性传感器是空间引力波探测的核心载荷,惯性传感器内的测试质量是惯性和测量基准.测试质量质心、形心偏移会产生杂散力噪声,空间引力波探测对测试质量质心、形心偏移的技术指标要求小于3.75μm.由于需要获得测试质量精确的质心位置,并且商用质心测量装置无法满足测试质量质心测量精度需求,因此设计了一种基于五线摆的新型质心测量装置,根据测得的五线摆自由振动频率得到测试质量质心位置.实验结果表明,质心测量精度优于±1µm,满足空间引力波探测惯性传感器测试质量质心测量的精度需求.
Research on Measuring Device and Method of Mass Center of Test Mass of Inertial Sensor
Inertial sensor is the key loads of space gravitational wave detection.The test mass(TM)in the inertial sensor is the inertial and measurement benchmark.The mass center offset from the geometric center of the TM generates stray force noise.Space gravitational wave detection requires less than 3.75µm for the mass center offset of the TM.Due to the need to obtain the precise the mass center of the TM,and commercial devices of measuring the mass center cannot meet the measurement accuracy of the mass center of the TM.In this paper,a novel mass center measuring device of a five-wire pendulum is designed,and the position of the mass center of the TM is obtained by measuring the free vibration frequency of the five-wire pendulum.Experimental results show that the measurement accuracy of the mass center of test mass is better than±1 µm,which satisfies requirements of the measurement accuracy of the mass center of the TM for space gravitational wave detection.

inertial sensortest massmass centerfive-wire torsion pendulum

梁铭涛、张晟、刘磊、王智

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中国科学院大学杭州高等研究院基础物理与数学科学学院

中国科学院大学

中国科学院长春光学精密机械与物理研究所

惯性传感器 测试质量 质心位置 五线摆

国家重点研发计划

2020YFC2200600

2024

工具技术
成都工具研究所

工具技术

CSTPCD北大核心
影响因子:0.147
ISSN:1000-7008
年,卷(期):2024.58(3)
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