In the process of grinding silicon rod with end wheel,a certain pressure air boundary layer is formed on ro-tating grinding wheel surface with high speed,which prevents the grinding fluid from entering the grinding zone effectively to participate in cooling.For this purpose,a new grinding wheel structure with a non-through groove along the inner radius of the abrasive ring is designed.The corresponding finite element simulation is carried out to analyze the flow field distribu-tion,and grinding experiments are carried out to evaluate the grinding performance of the slotted wheel from many aspects.The experimental results show that the average surface roughness value of silicon rod after grinding with slotted wheel is 0.095μm,which is about 10%lower than that with unslotted wheel.In the grinding process,the average maximum current value is 9.5A,which is reduced by about 21%.The average repair interval is 18700mm,increased by 38%.The surface of slotted grinding wheel is bright and has no obvious blackening phenomenon.The results show that the slotted grinding wheel can weaken the air barrier layer to some extent,increase the volume distribution of grinding fluid in the grinding area,im-prove the cleaning and cooling effect in the grinding area,improve the self-sharpness and sharpness of the grinding wheel,and thus improve the grinding quality and grinding efficiency.
关键词
开槽砂轮/端面磨削/硅棒/断续磨削/有限元模拟
Key words
slotted grinding wheel/end grinding/silicon rod/intermittent grinding/finite element simulation
维普
万方数据