工具技术2024,Vol.58Issue(9) :42-46.DOI:10.3969/j.issn.1000-7008.2024.09.007

功能层负偏压对AlCrN/TiSiN多层涂层力学性能的影响

Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocomposite AlCrN/TiSiN Coatings

梁小彪 陈亚奋 张家权
工具技术2024,Vol.58Issue(9) :42-46.DOI:10.3969/j.issn.1000-7008.2024.09.007

功能层负偏压对AlCrN/TiSiN多层涂层力学性能的影响

Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocomposite AlCrN/TiSiN Coatings

梁小彪 1陈亚奋 1张家权1
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作者信息

  • 1. 广东华升纳米科技股份有限公司
  • 折叠

摘要

通过电弧离子镀和高功率脉冲磁控溅射复合技术制备了功能层负偏压为40V,80V,120V和150V的多层AlCrN/TiSiN复合纳米涂层,通过SEM观察表面液滴,测量涂层硬度、结合力和应力,并进行切削测试,以此探究功能层负偏压变化对涂层性能的影响.测量结果表明,随着功能层负偏压的升高,涂层的液滴数量先减少后增加,硬度和结合力先升高后降低,硬度和结合力在120V时达到最大,分别为34.6GPa和117.5N,内应力随功能层负偏压的升高而升高.切削测试结果显示,功能层负偏压在120V时刀具达到8h的最长寿命.

Abstract

Multi-layer AlCrN/TiSiN composite coatings with functional layer biases of 40V,80V,120V,and 150V are prepared by arc ion plating+HiPiMS technology.Surface droplets are observed by SEM,coating hardness,coating adhesion and stress are measured,and cutting tests are conducted to explore the impact of functional layer bias changes on coating performance.It is found that as the bias voltage of the functional layer increases,the number of droplets decrease first and then increase,with the hardness and adhesion increase and then decrease.The hardness and adhesion reach their maximum at 120V,reaching 34.6GPa and 117.5N respectively.The internal stress increases with the increase of substrate bias of the functional layer.The cutting test results show that the longest service life is 8 hours with the 120V functional layer bias.

关键词

功能层负偏压/表面液滴/纳米硬度/结合力/切削性能

Key words

functional layer bias/surface droplets/nano hardness/adhesion/cutting performance

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出版年

2024
工具技术
成都工具研究所

工具技术

CSTPCD北大核心
影响因子:0.147
ISSN:1000-7008
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