Characterization of Residual Stresses in PVD Coatings with Side-incline Method and Rietveld Assisted Glancing Method
There are still many difficulties in determining stress of coating using X-ray diffraction method in practical applications,such as the selection of testing mode and parameters,and the determination of result accuracy.For composite multilayer coatings,the problem will be even more complex.In this experiment,the side-incline method and Rietveld assis-ted glancing method is used to characterize the residual stresses of cemented carbide based PVD coatings.Using their re-spective characteristics,a standard test flow is established within the applicable scope,and an accuracy verification test is conducted.The test results of a series of process test samples also indicate that this method has high reliability,and is con-ducive to rapid determination of coating stress in industrial production.The comparison between the σAVE measured by the side-incline method and the σACDR measured by the Rietveld assisted glancing method can better characterize the stress and stress variation trends of each phase in the coating,solving the problem of difficulty in determining accuracy using a single-testingmode.Reasonable use of Rietveld method can solve the unavoidable second phase interference in stress testing of multi-layer coatings.
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