In this paper,a two-dimensional coplanar precision motion platform with a large stroke is designed based on the composite reed-type flexible guiding mechanism,and the stiffness and maximum stroke of the platform are analyzed by using the bending moment formula of material mechanics.Under the condition of satisfying the maximum stress constraint of the material,the structural parameters of the guiding mechanism are designed,the experimental prototype of the precision motion platform is processed,and the flatness measurement platform is constructed.The flatness measurement is carried out for the motion plane within the stroke of 16mm×16mm,and the experimental analysis results show that the straightness er-ror of x-axis is 0.08μm,the straightness error of y-axis is 0.11μm,and the flatness is(0.26±0.12)μm.
维普
万方数据