The Thematic Course of Micro-nano Electronic Technology is a comprehensive elective course for microelectronics science and engineering majors in many colleges or universities,which is of great significance to improve students'cognition of the technical field,frontier trends and development trends of microelectronics industry.By combining with microelectronics project experience of team teachers and hot issues at home and abroad,the authors have written some chapters including micro-nano optoelectronics technology,MEMS system and so on.Taking MEMS system chapter as an example,we combined project of National Natural Science Foundation of China(NFSC)with the content of microelectronics teaching.Then the applications of microelectronics knowledge in university scientific research is discussed from the aspects of research background,technical bottleneck and solution method,highlighting the related concepts,characteristics,application status and development trend of key technologies involved in the field of microelectronics.The project based blended learning mode maybe useful for optimizing and promoting the training mode of microelectronics students.
micro-nano electronic technologymicroelectronics projecthot issues at home and abroadblended learning modeudent training