Integrated circuit industry is a strategic and leading industry in China,which plays a vital role in many fields related to economic and social development.However,during its producing process,the integrated circuit industry still suffers from many problems such as high water consumption,high pollution and high energy consumption.Taking more than 30 integrated circuit companies in Shanghai as examples,this study analyzes the water use structure and water-saving status of typical companies of integrated circuit materials producing,wafer manufacturing,and chips packaging and test.It is suggested that,optimization of pure water preparation,utilization of concentrated water according to water quality,improving the cleaning technology,collection of process water separately are important means to improve the water-conservation level.Finally,in order to promote the high-quality development of the integrated circuit industry,an overall strategy of water use-drainage-collection-recycling system based on regional collaboration is proposed.
关键词
集成电路行业/用水特点/节约用水/对策建议
Key words
integrated circuit industry/features of water use/water conservation/countermeasures
维普
万方数据