National Key Technologies R&D Program of ChinaNational Key Technologies R&D Program of ChinaNational Natural Science Foundation of ChinaScience and Technology Commission of Shanghai MunicipalityFudan Nanofabrication Laboratory,ShanghaiTech Quantum Device Lab,and ShanghaiTech Soft Matter Nanofab
2021YFA07153022021YFE01918006237505422ZR1405000SMN180827
2024