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石墨烯类涂层和表面织构对单晶硅摩擦性能的影响

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为了改善单晶硅的减摩耐磨性能,利用紫外激光加工技术在单晶硅表面刻蚀出不同形状的表面织构,并在织构上沉积石墨烯和氧化石墨烯涂层,通过MRTR-1摩擦磨损试验机研究表面织构和石墨烯类涂层对单晶硅在干摩擦条件下摩擦学性能的影响.利用光学显微镜和扫描电子显微镜(SEM)观察单晶硅试样的微观形貌及磨痕形貌,用电子天平称量实验前后试样的质量并计算磨损率.结果表明,与无织构试样相比,表面织构试样均能不同程度的降低磨损率,磨损率从0.012降至0.008以下;部分表面织构试样能够降低摩擦系数,摩擦系数低于0.14;单晶硅试样的磨损机制主要为磨粒磨损和粘着磨损.由于表面织构能起到收集磨屑,存储涂层碎片的作用,加上石墨烯类涂层特殊的物理特性,二者的结合作用能够有效改善单晶硅的摩擦性能,显著降低磨损率,保护材料.
Effect of graphene coating and surface texture on friction properties of single crystal silicon
In order to enhance the friction and wear resistance of single-crystal silicon,a surface texturing process was employed using ultraviolet laser machining.Various surface textures were etched onto the single-crystal silicon,followed by the deposition of graphene and graphene oxide coatings.The frictional properties of the single-crystal silicon under dry friction conditions were investigated using an MRTR-1 friction and wear tes-ting machine.Microscopic morphology and wear tracks of the single-crystal silicon samples were observed using optical microscopy and scanning electron microscopy(SEM).The mass of the samples was measured using an e-lectronic balance before and after the experiments to calculate the wear rate.The results indicate that surface-textured samples exhibited a reduction in wear rate to varying degrees,with wear rates decreasing from 0.012 to below 0.008 compared to untextured samples.Some of the surface-textured samples were able to lower the fric-tion coefficient to values below 0.14.The primary wear mechanisms of the single-crystal silicon samples were abrasive wear and adhesive wear.The combination of surface texturing,which acts to collect wear debris and store coating fragments,along with the unique physical properties of graphene-based coatings,effectively im-proved the frictional performance of single-crystal silicon,significantly reducing wear rates and protecting the material.

surface texturesingle crystal siliconfrictional weargraphenegraphene oxide

周意皓、陈文刚、程家豪、袁浩恩、郭思良、魏北朝、Dongyang Li

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西南林业大学机械与交通学院 昆明 650224

云南省Dongyang Li院士工作站,昆明 650224

Department of Chemical and Materials Engineering,University of Alberta,T6G 2H5,Canada

表面织构 单晶硅 摩擦磨损 石墨烯 氧化石墨烯

云南省Dongyang Li院士工作站项目云南省教育厅科研项目云南省教育厅科研项目国家自然科学基金

202305AF1500192023Y07622023Y076051865053

2024

功能材料
重庆材料研究院 中国仪器仪表学会仪表材料学会

功能材料

CSTPCD北大核心
影响因子:0.918
ISSN:1001-9731
年,卷(期):2024.55(5)