Researchon LiNbO3 single crystal thin films prepared using chemical mechanical polishing and its polarization
Silicon based lithium niobate(LiNbO3)single crystal heterogeneous integrated thin films were pre-pared using chemical mechanical polishing.The film states at different stages of the film preparation process were studied.The surface morphology and elemental content changes of single crystal LiNbO3 were character-ized using atomic force microscopy(AFM)and X-ray photoelectron spectroscopy(XPS).Large area periodic polarization of LiNbO3 thin films was achieved using high-pressure polarization device.The results indicate that combined with the grinding progresses,the surface roughness of the sample gradually decreases.After comple-ting the final polishing process,the root mean square roughness of the sample surface basically reaches the ini-tial sample level,and the polishing process may lead to the loss of Li,but it can be repaired through subsequent processes.The impurity elements introduced during the grinding process will gradually be removed as the process progresses,ultimately obtaining high-quality silicon based LiNbO3 single crystal films,and using a high-pressure polarization device to polarize LiNbO3 thin film,a period strip domain reversal was obtained.This study is of great significance for the manufacturing of high-performance sensor components based on LiNbO3.
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