首页|V含量对AlCrTiNbVxN薄膜结构和摩擦学性能影响

V含量对AlCrTiNbVxN薄膜结构和摩擦学性能影响

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为了探究V含量对AlCrTiNbVxN薄膜结构和摩擦学性能的影响,使用磁控溅射仪在304不锈钢基体上制备AlCrTiNbVxN薄膜.使用X射线衍射仪(XRD)、扫描电镜(SEM)等分析薄膜结构,使用纳米压痕仪、材料表面综合测试仪等表征薄膜力学性能和摩擦学性能.结果表明,AlCrTiNbVxN薄膜均呈面心立方结构,在(200)晶面呈择优取向,衍射角向右偏移.AlCrTiNbV1.0N薄膜在(200)晶面的偏移角度最大,晶面间距最小.随着V含量的增加,AlCrTiNbVxN薄膜的硬度和弹性模量先增大后减小,AlCrTiNbVxN的摩擦系数和磨痕宽度先减小后增大.AlCrTiNbV1.0 N薄膜具有最大的薄膜硬度和弹性模量,最小的摩擦系数和磨痕宽度,摩擦学性能最好.主要磨损机理为磨粒磨损、粘着磨损和氧化磨损.
Effect of V contents on microstructure and tribological properties of AlCrTiNbVxN film
In order to explore effect of V contents on microstructure and tribological properties of AlCrTiNbVxN films,the AlCrTiNbVxN films were deposited on 304 stainless steel by magnetron sputtering system.The structure of films was observed by X-ray diffraction(XRD),scanning electron microscope(SEM).The me-chanical properties and tribological properties of films were analyzed by nanoindenter and material surface com-prehensive tester.The results show that the AlCrTiNbVxN films show face-cubic structure and have preferred orientation of(200)plane.The diffraction angles shift to right.The AlCrTiNbV1.0N film has the biggest dif-fraction angle and the smallest interplanar spacing.With the increasing of V contents,the hardness and elastic modulus of films firstly increase and then decrease,and the friction coefficients of films and the width of wear tracks firstly decrease and then increase.The AlCrTiNbV1.0 N film has the biggest hardness and elastic modulus.The AlCrTiNbV1.0 N film exhibits the best tribological properties with the minimum friction coefficient and the minimum width of the wear track.The wear mechanisms are abrasive wear,adhesive wear,and oxidative wear.

AlCrTiNbVxN filmmagnetron sputteringtribological propertieshardnessV contents

阎红娟、米智丰、程方赢、司丽娜、豆照良、刘峰斌

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北方工业大学机械与材料工程学院,北京 100144

AlCrTiNbVxN薄膜 磁控溅射 摩擦学性能 硬度 V含量

国家自然科学基金资助项目北方工业大学毓优团队计划项目

5230532822XN746

2024

功能材料
重庆材料研究院 中国仪器仪表学会仪表材料学会

功能材料

CSTPCD北大核心
影响因子:0.918
ISSN:1001-9731
年,卷(期):2024.55(10)