In order to explore effect of V contents on microstructure and tribological properties of AlCrTiNbVxN films,the AlCrTiNbVxN films were deposited on 304 stainless steel by magnetron sputtering system.The structure of films was observed by X-ray diffraction(XRD),scanning electron microscope(SEM).The me-chanical properties and tribological properties of films were analyzed by nanoindenter and material surface com-prehensive tester.The results show that the AlCrTiNbVxN films show face-cubic structure and have preferred orientation of(200)plane.The diffraction angles shift to right.The AlCrTiNbV1.0N film has the biggest dif-fraction angle and the smallest interplanar spacing.With the increasing of V contents,the hardness and elastic modulus of films firstly increase and then decrease,and the friction coefficients of films and the width of wear tracks firstly decrease and then increase.The AlCrTiNbV1.0 N film has the biggest hardness and elastic modulus.The AlCrTiNbV1.0 N film exhibits the best tribological properties with the minimum friction coefficient and the minimum width of the wear track.The wear mechanisms are abrasive wear,adhesive wear,and oxidative wear.
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