首页|新型复合纳米压印膜结构的研究

新型复合纳米压印膜结构的研究

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本研究提出了一种新型复合纳米压印膜结构,以三明治结构为基础,采用弹性硅胶将柔性非扩张平面基底包裹.工艺包括在图形基板涂覆液态硅胶并固化,精准放置柔性非扩张平面基底,最后涂覆一层硅胶,形成硅胶压印区/柔性基底/硅胶保护区的三明治结构.该技术解决了单一柔性材料难以剥离和弹性材料压印过程中扩张现象导致的线宽波动问题.
Research on a Novel CompositeNanoimprint Film Structure
This study proposes a novel composite nanoimprint film structure,based on a sandwich struc-ture,using elastic silicone to wrap a flexible non expanding planar substrate.The process includes coat-ing liquid silicone on the graphic substrate and curing it,accurately placing a flexible non expanding flat substrate,and finally coating a layer of silicone to form a sandwich structure of silicone imprinting area/flexible substrate/silicone protection area.This technology solves the problem of difficulty in peeling off a single flexible material and the line width fluctuation caused by the expansion phenomenon during the em-bossing process of elastic materials.

Composite Nanoimprint filmSandwich StructureNon Expanding Planar BaseLine Width Fluctuation

杨志伟、Asim Abas、张雪陶、曹元勋、张杰

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吉林工业职业技术学院智能制造学院,吉林省吉林市 132013

中国科学院合肥物质科学研究院,安徽省 合肥市 230031

菏泽学院机电工程学院,山东省菏泽市 274000

复合纳米压印膜 三明治结构 非扩张平面基底 线宽波动

2024

功能材料与器件学报
中科院上海微系统与信息技术研究所 中国材料研究学会

功能材料与器件学报

影响因子:0.3
ISSN:1007-4252
年,卷(期):2024.30(3)