Microbeam X-ray fluorescence imaging(μ-XFI)is an important tool to obtain the distribution information of elements in the sample without destructive sample preparation.It is widely used in the analysis of elements in the micron region.Although synchrotron radiation is an ideal light source for μ-X FI,it is unsuitable for conventional applications because of its huge device,high cost and tense user time.Based on a laboratory X-ray tube,poli-capillary focusing lens,high-precision sample stage and silicon drift detector,the micro-beam X-ray fluorescence imaging system with element resolution imaging has been established;the performance test results show that the system has an element detection limit of 0.001％and a spatial resolution better than 20 microns.Based on the μ-XFI system,the spatial distribution of various main elements and trace elements in mouse brain,chip and ancient ceramic samples were obtained.The comprehensive results showed that the system could meet the needs of micro area X-ray fluorescence imaging and could provide help for biomedicine,electronic component detection,porcelain color composition identification and other fields.
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