The composition and structure analysis is an important way to understand and study matters.X-ray fluorescence analysis(XRF)is one of the most universal nondestructive analysis methods for the composition and structure of substances,which can be used for qualitative analysis and quantitative detection of elements in substances.During the detection of light elements by wavelength dispersive X-ray fluorescence spectrometer,multilayer analyzer crystals are key optics.Using artificial multilayer crystals instead of natural crystals as analyzer crystals can effectively improve the ability of spectrometer to detect light elements.This paper,aiming at the actual application demands of domestic wavelength dispersive X-ray fluorescence spectrometer to analyze light elements,Mo/B4C,Cr/C,Cr/Sc,W/B4C(period thickness d=3.63 nm)and W/B4C(period thickness d=2.85 nm)multilayer analyzer crystals are designed,which are suitable for the fluorescence analysis of light elements B,C,N,O,and F,respectively.Five kinds of multilayer crystals have been fabricated using the direct-current(DC)magnetron sputtering technique on super-polished silicon substrates with the size of 50 mmX30 mm by magnetron sputtering.Interfacial microstructures of as-deposited multilayer crystals were characterized by grazing incidence X-ray reflectometry(GIXR)on a high-resolution X-ray diffractometer.The measured results indicate that all five kinds of multilayer crystals have high-quality periodic layer structures and smooth interfaces,and the thickness deviation of period thickness for the five multilayer crystals is less than l％.Atomic force microscopy(AFM)was used to characterize the surface morphology of each multilayer crystal.The results reveal that all five multilayer crystals have smooth surface morphology and small surface roughness.Finally,the reflectivity of the five crystals at grazing incidence geometry was obtained by simulation:Mo/B4C(30.1％@B-Ka line),Cr/C(29.3％@C-Ka line),Cr/Sc(35.4％@N-Ka line),W/B4 C(d=3.63 nm,8.6％@O-Ka line),W/B4C(d=2.85 nm,10.7％@F-Ka line).Based on these investigations,the five kinds of multilayer analyzer crystals meet the practical application requirements of wavelength dispersive X-ray fluorescence spectrometer.They can be applied to detect light elements B,C,N,O,F.
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