In this essay,the effects of CoFe/NiFe composite free layer on magnetoresistance change rate with spin-valve structure were studied.In order to optimize the spin-valve structure and improve its magnetoresistance value(MR),the CoFe/NiFe composite free layer with different thickness and uniformity were obtained by target substrate distance(TSD)during the sputtering power,sputtering time and air flow were fixed in the experiment.The results show that when the TSD were 8.382 cm and 8.890 cm respectively,the optimal monolayer films of CoFe and NiFe were obtained with resistance stand-ard deviation to 1.33％and 0.98％,respectively.By magnetization measurements the giant magnetoresist-ance results show that the magnetoresistance value of spin-valve structure prepared at optimizing the CoFe/NiFe composite free layer increases by 0.84％than unoptimization free layer.The research work pro-vides a reference for the preparation of high-performance with spin-valve structure.
维普
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