高师理科学刊2024,Vol.44Issue(2) :97-100,105.DOI:10.3969/j.issn.1007-9831.2024.02.020

原子层沉积实验平台设计与教学应用

Design and teaching application of experimental platform for atomic layer deposition

陈明华 王凡 刘倩 张家伟 刘欣
高师理科学刊2024,Vol.44Issue(2) :97-100,105.DOI:10.3969/j.issn.1007-9831.2024.02.020

原子层沉积实验平台设计与教学应用

Design and teaching application of experimental platform for atomic layer deposition

陈明华 1王凡 1刘倩 1张家伟 1刘欣1
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作者信息

  • 1. 哈尔滨理工大学 电气与电子工程学院,黑龙江 哈尔滨 150080
  • 折叠

摘要

培养学生的创新思维和动手能力是新能源材料与器件专业的主要任务之一.原子层沉积技术因沉积厚度精确可控、共形性强等独特优势被广泛应用于电极材料及器件的改性.设计了一套原子层沉积技术教学平台,涵盖了原子层沉积技术的原理、优势及其在储能材料与器件领域的应用等多个单元,加强学生对储能材料与器件的认识,全面提升学生的科研能力,培养新能源材料与器件专业型人才.

Abstract

Cultivating students′ innovative thinking and hands-on ability is one of the main tasks of the new energy materials and devices major.Atomic layer deposition technology is widely used in the modification of electrode materials and devices due to its unique advantages such as precise and controllable deposition thickness and strong conformality.A set of atomic layer deposition technology teaching platforms has been designed,covering the principle,advantages and application of atomic layer deposition technology in the field of energy storage materials and devices,etc,to strengthen students′ understanding of energy storage materials and devices,and comprehensively improve students′ scientific research ability,and cultivate new energy materials and devices professional talents.

关键词

储能材料与器件/原子层沉积技术/教学平台

Key words

energy storage materials and devices/atomic layer deposition technology/teaching platform

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基金项目

黑龙江省高等教育教学改革项目(SJGY20220309)

黑龙江省教育科学规划2023年重点课题(GJB1423436)

哈尔滨理工大学教研课题(220210003)

出版年

2024
高师理科学刊
齐齐哈尔大学

高师理科学刊

影响因子:0.351
ISSN:1007-9831
参考文献量4
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