[Objective]In order to solve the problem of the limited bandwidth of polarization insensitive optical power splitter,an ultra-broadband polarization insensitive optical power splitter based on Silicon Nitride(Si3N4)waveguide is proposed.[Meth-ods]The ultra-broadband polarization insensitive optical power splitter is designed based on adiabatic coupling Si3 N4 waveguide.Optical bandwidth of 300 nm(from 1 400~1 700 nm)is demonstrated for both Transverse Electric(TE)and Transverse Magnetic(TM)modes.[Results]Over the entire optical bandwidth,the losses for TE and TM mode are less than 0.10 and 0.15 dB,respectively.The footprint of the proposed ultra-broadband polarization insensitive optical power splitter is only 60.00 μm×2.75 μm,which means that the optical power splitter can be used for large-scale integration.Furthermore,the rela-tionship between the performance and the structure parameters of the proposed optical power splitter is studied.[Conclusions]The results show that the performance of the optical power splitter maintains almost unchanged by varying the structure parameters with±50 nm.In other words,the optical power splitter possesses large fabrication tolerance which can be easily fabricated.
关键词
氮化硅波导/光分束器/偏振不敏感
Key words
Si3N4 waveguide/optical power splitter/polarization insensitive