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电容对石英晶体微天平质量灵敏度影响分析

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为探究振荡电路中电容对石英晶体微天平质量灵敏度的影响,提出了振荡电路的等效电路模型阻抗分析方法.首先,建立等效电路模型,分析阻抗与频率关系,揭示了电容容值与其质量灵敏度对应关系;其次,进行多物理场耦合仿真实验,探究了电容容值对其质量灵敏度的影响规律;最后,搭建实验系统平台,开展了质量灵敏度实验.结果表明,并联电容对其质量灵敏度影响较小;串联1.01 pF电容其质量灵敏度提升8.01×10-2 Hz/ng,串联15.84 pF电容其质量灵敏度提升1.49×10-2 Hz/ng.该结论有助于更好地理解电容对石英晶体微天平质量灵敏度影响,为该类传感器便携化、微型化设计提供有力支持.
Analysis of influence of capacitance on mass sensitivity of quartz crystal microbalances
To investigate the influence of capacitance on the mass sensitivity of quartz crystal microbalances in oscillating circuits,an equivalent circuit model impedance analysis method for oscillating circuits was proposed.Firstly,an equivalent circuit model was established to analyze the relationship between impedance and frequency,and the corresponding relationship between capacitance and mass sensitivity was revealed.Secondly,multi physics field coupling simulation experiments were conducted,and the influence of capacitance on its mass sensitivity was explored.Finally,the experimental system platform was built,and the quality sensitivity experiment was carried out.The results indicate that parallel capacitors have a relatively small impact on their mass sensitivity.The mass sensitivity of the 1.01 pF capacitor in series is increased by 8.01×10-2 Hz/ng,while the mass sensitivity of the 15.84 pF capacitor in series is increased by 1.49×10-2 Hz/ng.This conclusion helps to better understand the influence of capacitance on the mass sensitivity of quartz crystal microbalances,providing strong support for the portable and miniaturized design of such sensors.

quartz crystal microbalancemass sensitivitypiezoelectricityimpedance analysis

孙世政、郑天成、何泽银、黄思成、刘鑫鹏

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重庆交通大学机电与车辆工程学院 重庆 400074

石英晶体微天平 质量灵敏度 压电效应 阻抗分析

国家自然科学基金青年科学基金重庆市自然科学基金创新发展联合基金重庆市教育委员会科学技术研究项目重庆市技术创新与应用发展专项重大项目

52105542CSTB2023NSCQ-LZX0081KJZD-K202200705CSTB2023TIAD-STX0016

2024

10.19652/j.cnki.femt.2305880

国外电子测量技术
北京方略信息科技有限公司

国外电子测量技术

CSTPCD
影响因子：1.414
ISSN：1002-8978
年,卷(期)：2024.43(7)
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