With the application of GDMS in the determination of trace impurities in SiC raw materials and products with high purity,the results are as follows:1)compared with chemical analysis,the GDMS method has lower determination limits for the impurities of Fe and Al,more accurate determination of content,and higher determination precision;2)the SiC prepared by using anthracite and petroleum coke as carbon source contains more Fe and Al.In addition,the anthracite contains more Ca,while the petroleum coke contains more V.Impurities such as Fe,Cr,Mn,Ti will be introduced when SiC particles are ground into micro powders;3)considering that Al is mainly present in the form of Al2O3 and AlN in SiC,it is difficult to remove it through acid and alkali cleaning or impurity removal process,therefore the determination result of Al by using chemical analysis of GB/T 3045-2017 is seriously low.
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