首页|激光诱导等离子体加工蓝宝石微结构及其润湿性

激光诱导等离子体加工蓝宝石微结构及其润湿性

扫码查看
激光诱导等离子体刻蚀技术在蓝宝石表面微结构制作方面具有独特的优势.通过控制变量法研究了激光能量密度、靶材和蓝宝石之间的距离和扫描速度对激光诱导等离子体加工蓝宝石微槽的微观形貌和几何尺寸的影响规律.通过正交试验研究了激光诱导等离子体工艺参数对蓝宝石表面微结构接触角的影响,发现扫描线间距对接触角的影响最大,靶材和蓝宝石之间的距离和激光能量密度次之,扫描速度的影响最小.当激光能量密度为6.3 J/cm2,扫描线间距为200 μm,靶材和蓝宝石之间的距离为150 μm,扫描速度为10 mm/s时,蓝宝石表面微结构的接触角为136°,表现出良好的疏水性;当激光能量密度为7.4 J/cm2,扫描线间距为50 μm,靶材和蓝宝石之间的距离为100 μm,扫描速度为5 mm/s时,蓝宝石表面微结构的接触角为29°,具有较好的亲水性,并且长时间放置后表面接触角基本保持不变.通过扫描电镜观察发现,蓝宝石表面的微结构上分布着许多纳米颗粒,这些微纳结构共同影响蓝宝石的润湿性.
Laser-induced plasma-assisted ablation of sapphire microstructures and their wettability
Creating microstructures on sapphire surfaces is key to altering their wettability.The laser-in-duced plasma etching method offers distinct benefits for crafting these microstructures.This study exam-ines how laser fluence,the distance between the target and sapphire,and scanning speed impact the micro-grooves'morphology and geometry on sapphire surfaces using the laser-induced plasma-assisted ablation(LIPAA)technique,employing a controlled variable approach.Further,it explores how LIPAA's pro-cessing parameters affect the sapphire's surface contact angle through orthogonal testing.Results indicate that laser scan line spacing most significantly influences the surface contact angle,followed by the target-to-sapphire distance and laser fluence,with scanning speed having the minimal impact.At a laser fluence of 6.3 J/cm²,scan line spacing of 200 μm,target-to-sapphire distance of 150 μm,and scanning speed of 10 mm/s,the sapphire's surface contact angle reached 136°,demonstrating superior hydrophobicity.Con-versely,with a laser fluence of 7.4 J/cm²,scan line spacing of 50 μm,target-to-sapphire distance of 100μm,and scanning speed of 5 mm/s,the surface contact angle was 29°,indicating strong hydrophilicity,which remained stable over time.SEM observations revealed numerous nanoparticles on the sapphire mi-crostructures,which together influence the sapphire's wettability.

laser-induced plasma-assisted ablationsapphiremicrostructuresprocessing parametersurface wettability

王晓光、温秋玲、陈金鸿、黄国钦、崔长彩、姜峰

展开 >

华侨大学 制造工程研究院,福建 厦门 361021

激光诱导等离子体烧蚀 蓝宝石 微结构 工艺参数 表面润湿性

国家自然科学基金资助项目国家自然科学基金资助项目高等学校学科创新引智计划资助项目教育部创新团队滚动计划

5227553151805176B23011IRT_17R41

2024

光学精密工程
中国科学院长春光学精密机械与物理研究所 中国仪器仪表学会

光学精密工程

CSTPCD北大核心
影响因子:2.059
ISSN:1004-924X
年,卷(期):2024.32(3)
  • 3