For high-end manufacturing equipment or precision measurement instruments featuring preci-sion rotating shafting,traditional circular grating struggles to negate the impact of eccentricity error on an-gle measurement accuracy.This paper introduces a highly precise method for measuring rotation angles uti-lizing two-dimensional hybrid position coding.Initially,the system comprises a two-dimensional hybrid po-sition coding disk,two CCD cameras,and a telecentric lens.This assembly is attached to a precision rotat-ing shaft to capture its rotation angle.Subsequently,an angle measurement model is developed,mathemat-ically verifying that measurement accuracy remains unaffected by installation eccentricity.The method's ac-curacy is validated using a multi-tooth indexing table,confirming that angle measurement error is confined to within±1".Furthermore,when applied to assess the angle positioning accuracy of a direct drive turnta-ble,the method achieves an angle positioning error within±5".Unlike traditional circular grating measure-ments,this approach eliminates the need to account for the impact of eccentricity error on accuracy,offer-ing robustness and simplicity in application.Thus,it proves effective for detecting angle positioning errors.
关键词
二维混合式位置编码/偏心误差/旋转角度/多齿分度台
Key words
two-dimensional hybrid position coding/eccentricity error/rotation angle/multi-tooth index-ing table
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