High-precision angle measurement based on two-dimensional hybrid position encoding
For high-end manufacturing equipment or precision measurement instruments featuring preci-sion rotating shafting,traditional circular grating struggles to negate the impact of eccentricity error on an-gle measurement accuracy.This paper introduces a highly precise method for measuring rotation angles uti-lizing two-dimensional hybrid position coding.Initially,the system comprises a two-dimensional hybrid po-sition coding disk,two CCD cameras,and a telecentric lens.This assembly is attached to a precision rotat-ing shaft to capture its rotation angle.Subsequently,an angle measurement model is developed,mathemat-ically verifying that measurement accuracy remains unaffected by installation eccentricity.The method's ac-curacy is validated using a multi-tooth indexing table,confirming that angle measurement error is confined to within±1".Furthermore,when applied to assess the angle positioning accuracy of a direct drive turnta-ble,the method achieves an angle positioning error within±5".Unlike traditional circular grating measure-ments,this approach eliminates the need to account for the impact of eccentricity error on accuracy,offer-ing robustness and simplicity in application.Thus,it proves effective for detecting angle positioning errors.
two-dimensional hybrid position codingeccentricity errorrotation anglemulti-tooth index-ing table
万方数据
维普
