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针刺巨量转移平台用高推力聚磁式直线电机

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针对针刺式巨量转移平台用无铁芯直线电机推力小,边缘效应明显导致转移速度慢的问题,提出一种高推力聚磁式直线电机,利用外层V字形结构抑制漏磁效应,通过双层Halbach结构提高气隙磁密,并采用有限元法对3种方案气隙磁密和漏磁磁通进行比较分析。V形双层Halbach方案的气隙磁密和漏磁磁通分别为0。6 T和0。05 T,与单层梯形方案相比气隙磁密提高了17。6%,与双层Halbach方案相比漏磁磁通降低了71。4%。利用等效磁化电流法对电机磁场进行区域分割,采用分割补偿法建立矩形边界条件,建立了直线电机磁路数学模型,得到了影响电机推力线性度的关键结构参数,并基于有限元法对形状及结构参数进行优化。结果表明,优化后气隙的最大磁密和最小磁密分别 0。67 T和0。47 T,x向和y向磁密变化率分别为25%和29。8%,推力仿真计算结果为278 N,推力波动率为2。1%,空载加速度为10 m/s2,理论芯片转移速度可达50颗/秒。根据优化结果研制了一台直线电机用于巨量转移平台,测试结果与优化结果一致,本研究对提高巨量转移平台转移效率具有重要意义。
High thrust focused magnetic linear motor for needling massive transfer platform
A high thrust concentrated magnetic linear motor is proposed to address the problem of low thrust and obvious edge effects leading to slow transfer speed in needle punched massive transfer plat-forms.The outer V-shaped structure is used to suppress leakage magnetic effect,and the double-layer Halbach structure is used to improve air gap magnetic density.The finite element method is used to com-pare and analyse the air gap magnetic density and leakage magnetic flux of the three schemes.The air gap magnetic flux and leakage magnetic flux of the V-shaped double-layer Halbach scheme are 0.6 T and 0.05 T,respectively.Compared with the single-layer trapezoidal scheme,the air gap magnetic flux is increased by 17.6%,and the leakage magnetic flux is reduced by 71.4%.The equivalent magnetization current method was used to segment the magnetic field of the motor,and a rectangular boundary condition was es-tablished using the segmentation compensation method.A mathematical model of the magnetic circuit of the linear motor was established,and the key structural parameters affecting the linearity of the motor thrust were obtained.The shape and structural parameters were optimized based on the finite element method.The results show that after optimization,the maximum and minimum magnetic densities of the air gap are 0.67 T and 0.47 T,respectively.The change rates of magnetic densities in the x and y direc-tions are 25%and 29.8%,respectively.The thrust simulation calculation result is 278 N,the thrust fluc-tuation rate is 2.1%,the no-load acceleration is 10 m/s2,and the theoretical chip transfer speed can reach 50 pieces/s.Based on the optimization results,a linear motor was developed for the massive transfer plat-form.The test results are consistent with the optimization results,which is of great significance for im-proving the transfer efficiency of the massive transfer platform.

linear motoracupuncture type massive transfermagnetism gatheringfinite element meth-odspace application

刘强、马宁、王伟、韩邦成、牛萍娟

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北京石油化工学院 精密电磁装备与先进测量技术研究所,北京 102617

天津工业大学 电子与信息工程学院,天津 300387

北京航空航天大学 惯性技术重点实验室,北京 100191

直线电机 针刺式巨量转移 聚磁 有限元法 空间应用

北京市自然科学基金北京市市属高等学校高水平科研创新团队建设支持计划北京市市属高校分类发展专项

3212004BPHR2022011011000023T000002199202

2024

光学精密工程
中国科学院长春光学精密机械与物理研究所 中国仪器仪表学会

光学精密工程

CSTPCD北大核心
影响因子:2.059
ISSN:1004-924X
年,卷(期):2024.32(9)