Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
Microprism arrays are extensively utilized across various industries.Glass-based microprisms,in comparison to polymers,offer superior corrosion resistance,thermal stability,and durability.However,the isotropic nature of glass makes micromachining into prism-like structures challenging.In this paper,we introduce a novel interfacial erosion-induced quasi-anisotropic wet etching technique to manufacture glass microprism arrays efficiently and cost-effectively.For the first time,interfacial erosion is analyzed within a metacellular automaton to study the wet etching process,uncovering the dynamics between side etching and interfacial erosion and their impact on the side wall profiles.This approach yields varied microstruc-tures with tilted morphologies.Leveraging quasi-anisotropic etching characteristics,we successfully pro-duce microprism arrays with adjustable spacing,shape,and size,achieving 98%repeatability between ar-rays.Our method significantly enhances LED lamp diffusion,increasing average brightness by 4.6 times.This research not only pioneers a new direction in glass wet etching but also incorporates quasi-anisotropic properties into the traditional isotropic framework,presenting a straightforward,economical technique for fabricating glass microprism arrays and similar devices.
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维普
