激光跟踪仪几何结构误差标定及修正
Calibration and correction of geometric errors in laser tracker
王珊 1张滋黎 1董登峰 1周维虎 1纪荣祎 2潘映伶 1王国名 1崔成君2
作者信息
- 1. 中国科学院 微电子研究所,北京 100029;中国科学院大学,北京 100049
- 2. 中国科学院 微电子研究所,北京 100029
- 折叠
摘要
为了提高激光跟踪仪坐标测量精度,分析了跟踪仪的几何结构误差,研究了横竖轴平移误差、横竖轴倾斜误差、激光平移误差和激光倾斜误差的标定和修正方法.利用几何分析法建立了几何结构误差模型,基于投影图像测量仪和检棒、PSD搭建了几何误差参数的标定装置,实现对几何误差的快速自动高精度标定及补偿.最后,利用误差标定实验测量出的几何误差代入误差补偿模型,与标尺的长度进行比对分析.实验结果表明:经几何误差修正后的跟踪仪坐标测量误差从13 μm/m减小到4 μm/m以内,测量精度约提升了9 μm/m,验证了几何误差标定和修正方法的正确性,该方法可以提高激光跟踪仪的坐标测量精度.
Abstract
To enhance the coordinate measurement accuracy of laser trackers,we analyzed the geometric errors of the device and studied calibration and correction methods for transit offset error,transit tilt error,laser offset error,and laser tilt error.First,geometric error models were established using geometric analy-sis methods.A calibration device for geometric error parameters was constructed based on a telecentric measurement system,test rods and a PSD device.This setup allows for rapid,automatic high-precision calibration and compensation of geometric errors.Subsequently,the geometric errors measured by the cali-bration experiment were incorporated into the error compensation models,and the scale bar length mea-sured by the laser tracker was compared with its standard length.Experimental results indicate that after geometric error correction,the coordinate measurement error of the laser tracker can be reduced from 13 μm/m to less than 4 μm/m,improving measurement accuracy by approximately 9 μm/m.These findings confirm the validity of the geometric error calibration and correction methods,demonstrating that coordi-nate measurement accuracy of laser trackers can be significantly enhanced using these methods.
关键词
激光跟踪仪/几何结构误差/误差标定/误差修正/最小二乘法Key words
laser tracker/geometric errors/error calibration/error correction/least square method引用本文复制引用
基金项目
工业和信息化部高质量专项(TC220505T)
出版年
2024
国家科技期刊平台
NSTL
万方数据