The Wolter-type X-ray microscope,known for its high resolution and collecting area,is replac-ing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fab-ricating Wolter-type X-ray mirrors is nickel electroforming,where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision in-spection technology,yet traditional equipment struggles to measure the circumferentially symmetric sur-face profile of the Wolter type. To address this challenge,we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and ran-dom errors in the detection device were analyzed,and we employed a dual-probe calibration method with a standard mirror,reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter man-drel,validating the effectiveness and accuracy of our detection method.
万方数据