Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
This paper presents a method to compensate for measurement errors in a non-coaxial parallel chromatic confocal system caused by the inclination angle of the surface being measured. The approach in-volves constructing steps using two standard measuring blocks as test objects. First,the sample is moved laterally,and the collected surface height data is fitted to a straight line to derive the linear formula for the tilted surface. The slope of this line is then used to determine the surface tilt angle,and a trigonometric re-lationship calculates the error value for each data point. Finally,these errors are corrected through compen-sation. To ensure adequate spectral signal capture by the color camera,the object's tilt angle is maintained within[-4°,4°]. Experiments are conducted within this range at various tilt angles,with an example at 4° showing an average measured step height of 101.92 μm after compensation,resulting in a relative error of 3.00％. The system's measurement accuracy achieves micrometer-level precision.
万方数据
维普
