High-stroke XY precision positioning stage based on Zigzag flexure hinge
A parallel XY precision positioning platform utilizing a Zigzag flexure hinge as a guiding mecha-nism is presented,designed for large strokes,high precision,high frequency,and low stress to meet preci-sion motion requirements. The implementation features a flexure-based motion platform with the Zigzag flexure hinge as the core guiding beam,driven by a voice coil motor,achieving a motion range of 3mm×3mm and a natural frequency exceeding 60Hz. Finite element simulations compared the Zigzag flexure hinge with traditional straight beam hinges,demonstrating the Zigzag's superiority. Additionally,a decou-pling design was employed to minimize parasitic errors from coupled motion. Finite element analysis opti-mized the platform's configuration to mitigate fatigue damage from high-frequency movement,resulting in reduced maximum stress. The findings indicate that the platform satisfies the required motion and decou-pling performance,with a parasitic error of 0.012％. It supports large travel,high-frequency motion,rapid response,and excellent dynamic characteristics. Experimental results confirm a natural frequency of 60 Hz,an open-loop resolution of 1.3μm,and successful movement of±1.5mm in the XY direction.
万方数据
维普
