Study on the influence of temperature on the stability of aerostatic bearing with flexible structure
In order to study the influence of temperature on the deflection deformation,flow pattern and stability of the flexible structure of aerostatic bearing with flexible structure under the working state of aero-static bearing,a three-dimensional(3D)model of aerostatic thrust bearing with flexible structure was es-tablished in this paper.Firstly,the influence of temperature change on the deflection deformation of the flexible structure of aerostatic bearing,the flow pattern of gas film flow field and the stability of gas film were analyzed by using the calculation method of fluid solid thermal multi physical field coupling.Then,through the design of aerostatic bearing test-bed,the vibration of the bearing under the impact of load is tested,and the test results are compared with the simulation analysis results to verify the reliability of the simulation calculation.The calculation results show that the deflection deformation of the annular flexible thin plate at the orifice increases with the increase of temperature,and when the film gap h=12 μm,the deflection deformation of T=100℃is 43%higher than that of T=-20℃;Under the same other condi-tions,with the increase of temperature,the range of cyclone in the air film gradually decreases;The high-er the working temperature,the smaller the vibration amplitude of the bearing after being loaded.The ex-perimental results show that with the increase of working temperature,the stability of the bearing is high-er,which is basically consistent with the simulation results.This study provides a theoretical reference for the application of aerostatic bearing in the field of ultra precision.
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