Ion beam polishing process parameters optimization and polishing experiment of ZnS
Multispectral zinc sulfide is widely used in infrared optical guidance seeker,photoelectric detec-tion radar and airborne photoelectric pod because of its high optical transmittance in near,middle and far in-frared spectral bands.In order to obtain multi-spectral ZnS optical element with ultra-high surface shape accuracy and improve ion beam polishing efficiency,the orthogonal experiment method was used to carry out ion beam single point etching experiments on ZnS,and the removal function characteristics and volume removal efficiency were obtained under each process parameter.Through direct analysis of orthogonal ex-perimental data and range analysis,the process parameters were optimized with the target of maximum vol-ume removal rate.The optimized process parameters were obtained as follows:ion beam voltage 1 100 V,radio frequency power 110 W,acceleration voltage 200 V,argon flow rate 7 sccm,and processing dis-tance 30 mm.By adjusting the process parameters,different ion beam spot diameters were obtained for combined polishing of 80 mm diameter zinc sulfide.After processing,the surface shape accuracy of zinc sulfide decreased from 467 nm to 71.506 nm and from 112 nm to 10.75 nm.The above experimental re-sults show that the combination of large and small diameter ion beams can effectively improve the process-ing efficiency and surface shape accuracy of multi-spectral ZnS optical elements.
万方数据
维普
