This paper introduces a polarization-based single-frame wavefront reconstruction method using a compact and stable shear interferometry structure for real-time measurement of large aberration wave-fronts.This approach overcomes the need for multiple images in traditional lateral shear interferometry,al-lowing real-time reconstruction of large aberration samples.The method is theoretically supported by simu-lations based on an infinite conjugate model,and computational reconstruction of large aberration wave-front samples confirms the algorithm's feasibility.A dual-plane mirror tunable shear interferometry struc-ture,combined with polarization devices,is experimentally validated using a resolution target,achieving real-time fringe separation and wavefront reconstruction.The results show high accuracy with a root mean square error of 60 nm and improved runtime of 0.11 s.The proposed design and algorithm eliminate the need for multiple image reconstruction,simplify lateral shear interferometry,improve detection efficiency of three-dimensional macro and micro samples,and have potential applications in optical quantitative co-herent interferometric measurement.
关键词
剪切干涉/波前检测/大畸变/实时重构/偏振调控
Key words
shearing interference/wavefront detection/large aberration/real-time reconstruction/polar-ization control
维普
万方数据