摘要
为研究M-ZnS在机器人抛光过程中的材料去除模型和优化参数组合,探究M-ZnS光学元件的高精度、低成本、批量化制造方案,采用有限元法和数值仿真法,对M-ZnS的机器人抛光材料去除函数模型进行修正.基于有限元法建立了抛光盘的压力分布模型,采用曲线拟合方法得到了压力分布函数.仿真模型和实验数据对比表明,去除函数模型与实验数据中心相对偏差小于8%,证实了修正去除函数模型的有效性.然后,对抛光关键工艺参数进行优化,通过单因素实验法,获得了机器人抛光M-ZnS的优化工艺参数组合:对于10 mm的沥青盘,推荐压力为0.12～0.18 MPa,推荐的转速比为200/-10～200/-50 r/min.最后,采用修正的去除函数模型和优化工艺参数对100 mm口径的M-ZnS平面光学元件进行抛光,并对抛光前后的表面粗糙度和面形精度进行测量和对比.实验结果表明,经过单轮80.39 min抛光,表面质量明显提高,元件淡黄色逐渐褪去,表现为透明材料,面形PV从0.668 μm降至0.229 μm,收敛率为65%,表面粗糙度Sa从 7.911 nm降低至 2.472 nm,收敛率为 68%.机器人抛光技术可作为M-ZnS光学元件高效高质量加工的重要手段.
Abstract
To study and optimize the material removal model for robotic polishing of M-ZnS and enhance the precision and cost-effectiveness of manufacturing M-ZnS optical components,the material removal model is refined using the finite element method and numerical simulation.A pressure field distribution model for a 10 mm asphalt polishing disc is developed,and the pressure distribution function is determined through curve fitting.The accuracy of the adjusted removal function model is verified with a less than 8%deviation when comparing simulation and experimental data.The polishing process parameters are opti-mized using a one-factor experimental method,suggesting a pressure range of 0.12 to 0.18 MPa and spin-dle speed ratios of 200/-10 to 200/-50 r/min for 10 mm discs.These optimizations were applied to pol-ish 100 mm M-ZnS planar optical elements.Post-polishing,the surface quality significantly improved with-in 80.39 min;the M-ZnS transitioned from light yellow to transparent,face shape PV decreased from 0.668 μm to 0.229 μm,with a 65%improvement,and surface roughness Sa went from 7.911 nm to 2.472 nm,with a 68%enhancement.Thus,robotic polishing proves vital for efficient,high-quality finishing of M-ZnS optical components.
维普
万方数据