White-light interferometry immune to vibration disturbance over wide frequency region
The traditional white-light interferometer is highly sensitive to vibrations,causing scanning step errors and reducing measurement accuracy.To address this,a three-point arcsine(3P-Asin)algorithm is proposed.This method divides WLI interferograms into groups of three adjacent frames,with overlap be-tween groups.By analyzing fringe movement,the phase shift deviation and exact scanning step are deter-mined.Using this step,a least-squares method calculates phase and modulation for non-equal step scan-ning to reconstruct surface height.The 3P-Asin algorithm detects fast and large scanning step errors using only three interferograms,with no approximation.Simulations and experiments show it achieves an accura-cy of 0.5%for a 10 μm step height and adapts to various surfaces in mechanical machining.Both theoreti-cal and experimental results demonstrate that the 3P-Asin algorithm effectively attenuates scanning step er-rors across a wide frequency range,making it suitable for WLI in vibrating environments.
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