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激光准直测量中的空气随机扰动影响抑制

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鉴于准直光束在空气中传播,受空气随机扰动影响,如温度、湿度和压强的随机变化,激光直线测量基准存在随机抖动,从而影响激光准直测量的稳定性和准确性。从激光准直信号滤波的角度出发,提出了结合经验模态分解(EMD)-最小二乘(LS)拟合的空气随机扰动影响抑制方法;构建了激光准直信号分解、重构和校正的信号处理方案,以滤除空气随机扰动引起的干扰信号;开展了所提出方法在不同条件下对激光直线基准的空气扰动影响抑制实验,并比较不同方法对激光准直信号的处理效果。实验结果表明,所提方法对激光漂移补偿后的激光准直信号处理后,其在水平方向和竖直方向的波动标准偏差分别为0。01 μm和0。02 μm,有效解决了激光准直测量中的空气随机扰动对直线测量基准稳定性影响问题。
Suppression of effects of air random disturbances in laser collimation measurements
The highly directional laser collimated beam is extensively used as a linear measurement refer-ence in precision measurement.However,random air disturbances like fluctuations in temperature,humid-ity,and atmospheric pressure can induce jitter,compromising stability and accuracy.This paper introduces a method to counteract these disturbances by using Empirical Mode Decomposition(EMD)combined with Least Squares(LS)fitting for laser collimation signal filtering.The developed signal processing scheme de-composes,reconstructs,and corrects laser signals to remove such interferences.Experiments under vari-ous disturbance conditions show that the method proposed results in a standard deviation of fluctuations of 0.01 μm in the horizontal direction and 0.02 μm in the vertical direction after processing the laser alignment signal following laser drift compensation,significantly improves the stability of laser collimation measure-ments affected by atmospheric randomness.

laser collimationlinear datumair disturbancesempirical mode decomposition

刁宽、刘晓军、赵海煜

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华中科技大学 机械科学与工程学院,湖北 武汉 430074

激光准直 直线基准 空气扰动 经验模态分解

国家科学挑战专题资助项目

2018006-0102-02

2024

光学精密工程
中国科学院长春光学精密机械与物理研究所 中国仪器仪表学会

光学精密工程

CSTPCD北大核心
影响因子:2.059
ISSN:1004-924X
年,卷(期):2024.32(17)
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