Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
To achieve high-precision measurements of these components,micro/nano contact probes and white light interferometric probes must be combined for composite measurement.This paper presents a method to unify the spatial coordinate systems of the two probes using calibration points from a custom cali-brator and the unit quaternion method to derive the spatial transformation matrix,evaluated by root mean square error(RMSE).A novel calibrator was designed to offer stable reference points,with a model link-ing their accuracy to coordinate unification precision.Additionally,a data fusion method blending spatial er-ror ellipsoid search with weighted least squares was proposed,demonstrating a registration accuracy of 1.889 μm.This method decreased the relative error by 16%and improved repeatability precision by 38%compared to traditional least squares.The research enhanced the measurement precision and data fusion stability of composite measurement systems.
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