人工吸收杂质诱导增透膜损伤阈值研究
Study on damage threshold of antireflection film induced by artificial impurity
章汪维 1朱华新 2胡立发 2刘涛 1陈晓家 1郭东铭1
作者信息
- 1. 江南大学理学院,江苏无锡 214122
- 2. 江南大学理学院,江苏无锡 214122;江苏省轻工光电工程技术研究中心,江苏无锡214122
- 折叠
摘要
为研究杂质大小对增透膜激光损伤阈值(LIDT)影响,利用光刻技术在熔石英基底表面设置厚度为100nm不同直径大小的柱状金属Al"杂质吸收点",然后在此基础上沉积增透膜.通过Comsol模拟仿真了解损伤过程,并利用532nm纳秒激光器进行阈值测试,对实验数据与样品损伤形貌进行分析,结果表明杂质直径为50um、100um、200um、300um、400um 的薄膜损伤阈值分别为 18.93J/cm2,18.62J/cm2,17.11J/cm2,15.28J/cm2,13.47J/cm2,呈非线性下降,"杂质吸收点"吸收光能产生热量,传导于增透膜层后产生的轴向热应力超过了薄膜的拉伸强度是膜层损伤的主因.
Abstract
To study the influence of impurity size on the damage threshold of anti-reflection film,by using photoli-thography technology,cylindrical Al impurities with different diameters and thickness of 100nm were added between the fused quartz and the anti-reflection film.Comsol was used to understand the damage process,and the 532nm nanosecond laser was used for threshold test,then the experimental data and the sample damage morphology are analyzed,the results show that the damage thresholds of the films with impurity diameters of 50um,100um,200um,300um and 400um are respectively 18.93J/cm2,18.62J/cm2,17.11 J/cm2,15.28J/cm2,13.47J/cm2,which goes down nonlinearly,and the main cause of film damage is that the"impurity absorption point"absorbs laser energy to generate heat,and the axial thermal stress generated by conduction to the anti-reflection film exceeds the tensile strength of the film.
关键词
增透膜/杂质诱导/薄膜损伤阈值Key words
anti-reflection film/impurity induction/film damage threshold引用本文复制引用
基金项目
国家自然科学基金青年基金(61605067)
江苏省轻工光电工程技术研究中心(BM2014402)
出版年
2024
NETL
NSTL
万方数据