棱镜是空间和军用白光、红外光学系统中的关键元件之一,能够在光学系统中实现更高精度的成像质量,故提出了超高精度棱镜的加工和检测技术.首先,分析了适用于棱镜加工的工装材料及加工方法,指出了超高精度棱镜加工的难点和关键点.然后,介绍了超高精度棱镜加工的工装制作、棱镜粘接、加工、检测方法,以及预防损害棱镜工装的防护措施.最后,通过加工总高为35～95mm的施密特硒化锌棱镜,用Zygo干涉仪进行面形检测,其面形精度达到RMS 0.007μm(λ=632.8nm);用精密测角仪Pris mm aster C2000进行角度检测,其第一光学平行差小于1";用XQ20-GI平面激光干涉仪检测第二光学平行差为1.048";用原子力显微镜检测表面粗糙度为2.9nm.
Research on the processing and testing technology of ultra high precision prism
Prism is one of the key components in space and military white light and infrared optical systems,which can achieve higher precision imaging quality in optical systems.Therefore,the processing and detection technology of ul-tra high precision prism is proposed.Firstly,the tooling materials and processing methods suitable for prism processing are analyzed,and the difficulties and key points of ultra high precision prism processing are pointed out.Then,it intro-duces the tooling making,prism bonding,processing,detection methods of ultra high precision prism processing,as well as protective measures to prevent damage to prism tooling.Finally,the Schmitt zinc selenide prism with a total height of 35～95mm was processed,and the surface shape was detected with a Zygo interferometer,the surface shape accuracy reached RMS 0.007μm(λ=632.8nm);The precision goniometer Prismm aster C2000 is used for angle detection,The first optical parallel difference is less than 1";and the second optical parallel difference is 1.048"when measured with XQ20-GI plane laser interferometer;Atomic force microscopy Surface roughness 2.9nm.
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