倾斜入射下超透镜亚波长聚焦特性研究
Sub-wavelength focusing characteristics study of the metalens under oblique incidence
邹依洋 1武志翔 1刘泉澄 1李新羽 2熊亮 1邓琥 1尚丽平3
作者信息
- 1. 西南科技大学信息工程学院检测技术及应用研究所,四川绵阳 621010
- 2. 西南科技大学制造科学与工程学院检测技术及应用研究所,四川绵阳 621010
- 3. 西南科技大学信息工程学院检测技术及应用研究所,四川绵阳 621010;西南科技大学信息工程学院极端条件物性联合实验室,四川绵阳 621010
- 折叠
摘要
亚波长聚焦透镜被广泛应用于光学显微、成像和光刻等光学领域,具有亚波长结构的聚焦光场在倾斜入射下存在着严重影响光学成像质量的轴外像差.文章展示了一种高数值孔径(0.970)的光学超透镜设计方法,利用具有宽角度响应超原子的光场调控功能,结合孔径对倾斜入射光场的矫正,可同时满足倾斜入射时亚波长紧聚焦和宽带操作.数值仿真结果表明,在带有5μm孔径的超透镜中,可在倾斜入射角±30°范围内实现亚波长紧聚焦,峰值半高全宽范围为0.600～0.885λ;在550～750nm的入射波长范围内实现亚波长聚焦,并且其操作带宽达到200nm.
Abstract
Sub-wavelength focusing lenses are widely used in optical applications such as optical microscopy,imaging,and lithography.The focused optical field with sub-wavelength structure has additional axial aberrations that severely af-fect the quality of optical imaging at oblique incidence.A high numerical aperture(0.970)optical metalens design method is presented,which can simultaneously meet the sub-wavelength tight focusing and broadband operation at oblique inci-dence.Optical field control functions with wide-angle response meta-atoms are used,combined with corrections to the ob-lique incident optical field by aperture stop.The numerical simulation results show that the metalens with 5pm aperture stop,sub-wavelength tight focusing can be achieved within the incidence angle 士30°,and the peak full-width-at-half-maximum range is 0.600～0.885λ.Sub-wavelength focusing is achieved in the incident wavelength range of 550～750nm with an operational bandwidth of 200 nm.
关键词
超表面/亚波长聚焦/光学/高数值孔径/倾斜入射Key words
metasurface/sub-wavelength focusing/optics/high numerical aperture/oblique incidence引用本文复制引用
基金项目
国家自然科学基金(62105271)
四川省科技厅支撑计划(2020YJ0160)
西安近代化工研究所开放基金(SYJJ20210411)
西南科技大学博士基金项目(19zx7160)
出版年
2024
NETL
NSTL
万方数据