Research on micro vibration measurement based on laser self-mixing interferometry
It is proposed to build a new type of laser self-hybrid interference system,use the laser self-mixed inter-ference effect,and select the narrow line width and low noise line polarizing solid laser as a light source,increase the EOM electro-light modulation crystal,and introduce electro-optic orthogonal modulation and demodulation algorithms.Experimental and theoretical analysis shows that laser self-hybrid interference can achieve vibration measurement under weak feedback,and the newly constructed self-hybrid system structure is simple,convenient to operate,and easy to a-chieve miniaturization.The problem of migration of the jump point improves the speed of signal processing and the real time of measurement.Therefore,the laser self-hybrid interference instrument of the electro-lighting and demodulation can overcome the limitations of the target mirror on the application scenarios of the interference instrument,and realize the real-time measurement of the nano-level high-precision of the non-co-operating surface.
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